Invention Grant
US09046792B2 Projection exposure tool for microlithography and method for microlithographic imaging 有权
用于微光刻的投影曝光工具和用于微光刻成像的方法

Projection exposure tool for microlithography and method for microlithographic imaging
Abstract:
A projection exposure tool for microlithography for imaging mask structures of an image-providing substrate onto a substrate to be structured includes a measuring apparatus configured to determine a relative position of measurement structures disposed on a surface of one of the substrates in relation to one another in at least one lateral direction with respect to the substrate surface and to thereby simultaneously measure a number of measurement structures disposed laterally offset in relation to one another.
Information query
Patent Agency Ranking
0/0