Invention Grant
US09046792B2 Projection exposure tool for microlithography and method for microlithographic imaging
有权
用于微光刻的投影曝光工具和用于微光刻成像的方法
- Patent Title: Projection exposure tool for microlithography and method for microlithographic imaging
- Patent Title (中): 用于微光刻的投影曝光工具和用于微光刻成像的方法
-
Application No.: US13785707Application Date: 2013-03-05
-
Publication No.: US09046792B2Publication Date: 2015-06-02
- Inventor: Jochen Hetzler , Aksel Goehnermeier
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102010041556 20100928
- Main IPC: G03F9/00
- IPC: G03F9/00 ; G01B11/00 ; G03F7/20 ; G01B11/14 ; G01B9/02

Abstract:
A projection exposure tool for microlithography for imaging mask structures of an image-providing substrate onto a substrate to be structured includes a measuring apparatus configured to determine a relative position of measurement structures disposed on a surface of one of the substrates in relation to one another in at least one lateral direction with respect to the substrate surface and to thereby simultaneously measure a number of measurement structures disposed laterally offset in relation to one another.
Public/Granted literature
- US20130252146A1 Projection Exposure Tool for Microlithography and Method for Microlithographic Imaging Public/Granted day:2013-09-26
Information query