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US09047532B2 System, method and computer program product for evaluating an actual structural element of an electrical circuit 有权
用于评估电路的实际结构元件的系统，方法和计算机程序产品

System, method and computer program product for evaluating an actual structural element of an electrical circuit
Abstract:
A method, a system and a computer program product for evaluating an actual structural element of an electrical circuit. The method includes: detecting an actual structural element contour by processing a scanning electron microscope image of the actual structural element; aligning the actual structural element contour with a simulated contour to provide an aligned actual structural element contour; wherein the simulated contour is obtained by simulating a lithographic process that is responsive to a design contour; and comparing between the aligned actual structural element contour and reference information.
Abstract(Chinese):

一种用于评估电路的实际结构元件的方法，系统和计算机程序产品。 该方法包括：通过处理实际结构元件的扫描电子显微镜图像来检测实际结构元素轮廓; 将实际结构元素轮廓与模拟轮廓对齐以提供对准的实际结构元素轮廓; 其中所述模拟轮廓是通过模拟响应于设计轮廓的光刻过程获得的; 并比较对齐的实际结构元素轮廓和参考信息。

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