Invention Grant
- Patent Title: Platelike workpiece with alignment mark
- Patent Title (中): 具有对准标记的平板工件
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Application No.: US14244086Application Date: 2014-04-03
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Publication No.: US09047671B2Publication Date: 2015-06-02
- Inventor: Nobuhide Maeda
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Disco Corporation
- Current Assignee: Disco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: JP2013-077638 20130403
- Main IPC: G06T3/00
- IPC: G06T3/00

Abstract:
A platelike workpiece having an alignment mark formed on the front side thereof and adapted to be recognized by an imaging unit included in an alignment apparatus for performing alignment. The platelike workpiece includes a plurality of direction indicating marks formed at given intervals so as to surround the alignment mark. Each of the direction indicating marks is pointed toward the alignment mark. The space of the direction indicating marks is set so that at least two of the plural direction indicating marks fall in the visual field of the imaging unit in viewing the platelike workpiece from the imaging unit.
Public/Granted literature
- US20140301631A1 PLATELIKE WORKPIECE WITH ALIGNMENT MARK Public/Granted day:2014-10-09
Information query
IPC分类:
G | 物理 |
G06 | 计算;推算或计数 |
G06T | 一般的图像数据处理或产生 |
G06T3/00 | 在图像平面内的图形图像转换 |