Invention Grant
US09047671B2 Platelike workpiece with alignment mark 有权
具有对准标记的平板工件

Platelike workpiece with alignment mark
Abstract:
A platelike workpiece having an alignment mark formed on the front side thereof and adapted to be recognized by an imaging unit included in an alignment apparatus for performing alignment. The platelike workpiece includes a plurality of direction indicating marks formed at given intervals so as to surround the alignment mark. Each of the direction indicating marks is pointed toward the alignment mark. The space of the direction indicating marks is set so that at least two of the plural direction indicating marks fall in the visual field of the imaging unit in viewing the platelike workpiece from the imaging unit.
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