Invention Grant
- Patent Title: Semiconductive micro- and nano-wire array manufacturing
- Patent Title (中): 半导体微纳米线阵列制造
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Application No.: US13972809Application Date: 2013-08-21
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Publication No.: US09048097B2Publication Date: 2015-06-02
- Inventor: Emily L. Warren , Heather A. Audesirk , Nathan S. Lewis
- Applicant: California Institute of Technology
- Applicant Address: US CA Pasadena
- Assignee: California Institute of Technology
- Current Assignee: California Institute of Technology
- Current Assignee Address: US CA Pasadena
- Agency: Gavrilovich, Dodd & Lindsey LLP
- Agent Joseph R. Baker, Jr.
- Main IPC: H01L21/02
- IPC: H01L21/02
Abstract:
The disclosure provides methods of manufacturing semiconductive structures using stamping and VLS techniques.
Public/Granted literature
- US20140057416A1 SEMICONDUCTIVE MICRO- AND NANO-WIRE ARRAY MANUFACTURING Public/Granted day:2014-02-27
Information query
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