Invention Grant
- Patent Title: Interdigitated finFETs
- Patent Title (中): 互斥鳍片
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Application No.: US14031202Application Date: 2013-09-19
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Publication No.: US09048123B2Publication Date: 2015-06-02
- Inventor: Karl R. Erickson , Phil C. Paone , David P. Paulsen , John E. Sheets, II , Gregory J. Uhlmann , Kelly L. Williams
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Richard A. Wilhelm; Robert R. Williams
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L21/8238 ; H01L27/092

Abstract:
A semiconductor device includes a first fin rising out of a semiconductor base. It further includes a second fin rising out of the semiconductor base. The second fin is substantially parallel to the first fin that forms a span between the first fin and the second fin. A first dielectric layer is deposited on exposed surfaces of a first gate body area of the first fin, a second gate body area of the second fin, and an adjacent surface of the semiconductor base that defines the span between the first and second gate body areas. A gate electrode layer is sandwiched between the first dielectric layer and a second dielectric layer. The semiconductor device includes a third fin interdigitated between the first fin and the second fin within the span. Exposed surfaces of the gate body area of the third fin are in contact with the second dielectric layer.
Public/Granted literature
- US20150076615A1 INTERDIGITATED FINFETS Public/Granted day:2015-03-19
Information query
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