Invention Grant
US09048132B2 Lateral double diffused metal oxide semiconductor device and method for manufacturing the same 有权
横向双扩散金属氧化物半导体器件及其制造方法

Lateral double diffused metal oxide semiconductor device and method for manufacturing the same
Abstract:
An LDMOS device includes a second conduction type buried layer, a first conduction type drain extension region configured to be formed on and/or over a region of the second conduction type buried layer, a second conduction type drain extension region configured to be formed in a partial region of the first conduction type drain extension region, a first conduction type body, a first guard ring configured to be formed around the second conduction type drain extension region and configured to include a second conduction type impurity layer, and a second guard ring configured to be formed around the first guard ring and configured to include a high-voltage second conduction type well and a second conduction type impurity layer. Further, the second conduction type impurity layer of the first guard ring and the second conduction type impurity layer of the second guard ring operate as an isolation.
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