Invention Grant
- Patent Title: Method of manufacturing TFT array using multi-tone mask
- Patent Title (中): 使用多色调掩模制造TFT阵列的方法
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Application No.: US13574248Application Date: 2012-05-09
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Publication No.: US09048148B2Publication Date: 2015-06-02
- Inventor: Hua Huang , Pei Jia
- Applicant: Hua Huang , Pei Jia
- Applicant Address: CN Guangdong
- Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Guangdong
- Priority: CN201210132092 20120428
- International Application: PCT/CN2012/075232 WO 20120509
- International Announcement: WO2013/159396 WO 20131031
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L27/12

Abstract:
The present invention discloses a thin-film transistor (TFT) array substrate and a manufacturing method thereof. Depositing a transparent conductive layer and a first metal layer on a substrate, which is patterned by a multi-tone mask (MTM) to form a gate, a common electrode and a reflecting layer; depositing a gate insulation layer, which is patterned by a first mask to remain the gate insulation layer on the gate; depositing a semiconductor layer, which is patterned by a second mask to remain the semiconductor layer on the gate; and depositing a second metal layer, which is patterned by a third mask to form a source and a drain.
Public/Granted literature
- US20130285063A1 THIN-FILM TRANSISTOR ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF Public/Granted day:2013-10-31
Information query
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