Invention Grant
US09048148B2 Method of manufacturing TFT array using multi-tone mask 有权
使用多色调掩模制造TFT阵列的方法

Method of manufacturing TFT array using multi-tone mask
Abstract:
The present invention discloses a thin-film transistor (TFT) array substrate and a manufacturing method thereof. Depositing a transparent conductive layer and a first metal layer on a substrate, which is patterned by a multi-tone mask (MTM) to form a gate, a common electrode and a reflecting layer; depositing a gate insulation layer, which is patterned by a first mask to remain the gate insulation layer on the gate; depositing a semiconductor layer, which is patterned by a second mask to remain the semiconductor layer on the gate; and depositing a second metal layer, which is patterned by a third mask to form a source and a drain.
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