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US09048164B2 Solid-state image sensing device containing electron multiplication function having N-type floating diffusion (FD) region formed within a P-type well region 有权
含有形成在P型阱区内的具有N型浮动扩散(FD)区域的电子倍增功能的固体摄像装置

Solid-state image sensing device containing electron multiplication function having N-type floating diffusion (FD) region formed within a P-type well region
Abstract:
A solid state imaging device includes a P-type semiconductor substrate 1A, a P-type epitaxial layer 1B grown on the semiconductor substrate 1A, an imaging region VR grown within the epitaxial layer 1B, and an N-type semiconductor region 1C grown within the epitaxial layer 1B. The solid state imaging device further includes a horizontal shift register HR that transmits a signal from the imaging region VR, and a P-type well region 1D formed within the epitaxial layer 1B. The N-type semiconductor region 1C extends in the well region 1D. A P-type impurity concentration in the well region 1D is higher than a P-type impurity concentration in the epitaxial layer 1B. A multiplication register EM that multiplies electrons from the horizontal shift register HR is formed in the well region 1D.
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