Invention Grant
- Patent Title: Nonvolatile storage device
- Patent Title (中): 非易失存储设备
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Application No.: US13530453Application Date: 2012-06-22
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Publication No.: US09048176B2Publication Date: 2015-06-02
- Inventor: Takeshi Sonehara , Nobuaki Yasutake
- Applicant: Takeshi Sonehara , Nobuaki Yasutake
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-195656 20110908
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L29/10 ; H01L27/24

Abstract:
According to one embodiment, a method for manufacturing a nonvolatile storage device. The device includes a plurality of first conductive layers each extending in a first direction, a plurality of second conductive layers each extending in a second direction and spaced from the first layers, and memory cells each provided between the first layers and the second layers and including a rectifying element including a semiconductor layer, and a variable resistance element stacked with the rectifying element. The method includes a film formation step, a heating step and a patterning step. The film formation step is configured to form a rectifying element material film including an amorphous semiconductor film. The heating step is configured to heat the rectifying element material film. The patterning step is configured to form the rectifying element including the semiconductor layer by patterning the rectifying element material film after the heating step.
Public/Granted literature
- US20130062590A1 METHOD FOR MANUFACTURING NONVOLATILE STORAGE DEVICE AND NONVOLATILE STORAGE DEVICE Public/Granted day:2013-03-14
Information query
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