Invention Grant
- Patent Title: Die seal ring and method of forming the same
- Patent Title (中): 模具密封环及其形成方法
-
Application No.: US13921174Application Date: 2013-06-18
-
Publication No.: US09048246B2Publication Date: 2015-06-02
- Inventor: Ming-Te Wei , Po-Chao Tsao , Ching-Li Yang , Chien-Yang Chen , Hui-Ling Chen , Guan-Kai Huang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/768 ; H01L21/78 ; H01L23/58

Abstract:
A die seal ring is provided. The die seal ring includes a substrate and a first layer extruding from the substrate. The first layer has a first fin ring structure and a layout of the first fin ring structure has a stamp-like shape. In addition, a method for forming a die seal ring is provided. A substrate having an active region is provided. A patterned sacrificial layer is formed on the substrate. A spacer is formed on the sidewall of the patterned sacrificial layer. The patterned sacrificial layer is removed. The substrate is patterned by using the spacer as a mask, thereby simultaneously forming at least a fin structure of a Fin-FET and a first layer of the die seal ring.
Public/Granted literature
- US20140367835A1 Die Seal Ring and Method of Forming the Same Public/Granted day:2014-12-18
Information query
IPC分类: