Invention Grant
- Patent Title: Substrate liquid treatment apparatus with lift pin plate
- Patent Title (中): 带升降针板的基板液体处理装置
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Application No.: US13337533Application Date: 2011-12-27
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Publication No.: US09048269B2Publication Date: 2015-06-02
- Inventor: Jiro Higashijima , Nobuhiro Ogata , Satoshi Kaneko , Shuichi Nagamine , Yoshihiro Kai
- Applicant: Jiro Higashijima , Nobuhiro Ogata , Satoshi Kaneko , Shuichi Nagamine , Yoshihiro Kai
- Applicant Address: JP Minato-Ku
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Minato-Ku
- Agency: Burr & Brown, PLLC
- Priority: JP2010-293775 20101228; JP2011-240325 20111101
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687

Abstract:
Disclosed is a liquid treatment apparatus for processing a lower surface of the substrate. The apparatus includes a first nozzle disposed below a lower surface of the substrate retained by the substrate retaining unit to eject a treatment liquid towards the lower surface of the substrate, the first nozzle having a plurality of first ejection ports, which are arrayed from a position opposing a central portion of the substrate retained by the substrate retaining unit to a position opposing a peripheral portion of the substrate retained by the substrate retaining unit. An ejecting direction of the treatment liquid ejected from the first ejection port is inclined towards a rotation direction of the substrate rotated by the rotational driving unit.
Public/Granted literature
- US20120160278A1 LIQUID TREATMENT APPARATUS AND METHOD Public/Granted day:2012-06-28
Information query
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