Invention Grant
- Patent Title: Portable stocker and method of using same
- Patent Title (中): 便携式储存器及其使用方法
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Application No.: US12329664Application Date: 2008-12-08
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Publication No.: US09048274B2Publication Date: 2015-06-02
- Inventor: Wei-Cheng Wang , Feng-Ning Lee , Chi-Feng Tung , Mao-Lin Kao , Li-Jen Ko
- Applicant: Wei-Cheng Wang , Feng-Ning Lee , Chi-Feng Tung , Mao-Lin Kao , Li-Jen Ko
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: H01L21/677
- IPC: H01L21/677
Abstract:
A system comprising a conveyor. A semiconductor processing tool has a lifter port. The tool is positioned near the conveyor, such that the lifter port is configured to transport a Front Opening Unified Pod (FOUP) between the conveyor and the lifter port. An upstream stocker and a downstream stocker are both co-located with the conveyor and the tool. The upstream and downstream stockers each have a respective storage space for the FOUP and a respective robotic device configured to transport the FOUP between its respective storage space and the conveyor. The upstream stocker is configured to receive the FOUP from an overhead transport (OHT) and deliver the FOUP to the conveyor. The downstream stocker is configured to receive the FOUP from the conveyor and deliver the FOUP to the OHT.
Public/Granted literature
- US20100143082A1 PORTABLE STOCKER AND METHOD OF USING SAME Public/Granted day:2010-06-10
Information query
IPC分类:
