Invention Grant
- Patent Title: Transport system and set-up method
- Patent Title (中): 运输系统和设置方法
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Application No.: US13387300Application Date: 2010-07-23
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Publication No.: US09048275B2Publication Date: 2015-06-02
- Inventor: Masanao Murata , Tatsuya Kumehashi
- Applicant: Masanao Murata , Tatsuya Kumehashi
- Applicant Address: JP Kyoto
- Assignee: Murata Machinery, Ltd.
- Current Assignee: Murata Machinery, Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2009-176385 20090729
- International Application: PCT/JP2010/004719 WO 20100723
- International Announcement: WO2011/013338 WO 20110203
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/673
Abstract:
In a transport system, a positioning hole is provided in an undersurface of a container. A positioning protrusion corresponding to the positioning hole of the container is provided on a first load port of a manufacturing device. When a transport vehicle places the container onto the first load port, the placement position of the container is established by having the positioning protrusion of the first load port fit into the positioning hole. A second load port different from the first load port of the manufacturing device is provided on a storage device. A positioning protrusion is not provided on the second load port. A slip prevention member is provided on an upper surface of the second load port.
Public/Granted literature
- US20120128452A1 TRANSPORT SYSTEM AND SET-UP METHOD Public/Granted day:2012-05-24
Information query
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