Invention Grant
- Patent Title: Method of manufacturing a semiconductor device having multi-layered interconnect structure
- Patent Title (中): 制造具有多层互连结构的半导体器件的方法
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Application No.: US14300836Application Date: 2014-06-10
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Publication No.: US09048291B2Publication Date: 2015-06-02
- Inventor: Naoya Inoue , Kishou Kaneko , Yoshihiro Hayashi
- Applicant: Renesas Electronics Corporation
- Applicant Address: JP Kanagawa
- Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Young & Thompson
- Priority: JP2011-275182 20111216
- Main IPC: H01L21/4763
- IPC: H01L21/4763 ; H01L21/768 ; H01L29/66 ; H01L29/78 ; H01L29/861 ; H01L23/522 ; H01L23/532 ; H01L49/02

Abstract:
Disclosed is a semiconductor device provided with an active element in a multilayer interconnect layer and decreased in a chip area. A second interconnect layer is provided over a first interconnect layer. A first interlayer insulating layer is provided in the first interconnect layer. A semiconductor layer is provided in a second interconnect layer and in contact with the first interlayer insulating layer. A gate insulating film is provided over the semiconductor layer. A gate electrode is provided over the gate insulating film. At least two first vias are provided in the first interconnect layer and in contact by way of upper ends thereof with the semiconductor layer.
Public/Granted literature
- US20140295657A1 METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE HAVING MULTI-LAYERED INTERCONNECT STRUCTURE Public/Granted day:2014-10-02
Information query
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