Invention Grant
- Patent Title: Dual material finFET on same substrate
- Patent Title (中): 双材料finFET在同一基板上
-
Application No.: US14027591Application Date: 2013-09-16
-
Publication No.: US09048318B2Publication Date: 2015-06-02
- Inventor: Effendi Leobandung
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Louis J. Percello, Esq.
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/088 ; H01L29/78 ; H01L21/84 ; H01L27/12 ; H01L21/8234 ; H01L21/8238 ; H01L27/092 ; H01L27/108 ; H01L29/417

Abstract:
A method of fabricating a semiconductor device including proving a substrate having a germanium containing layer that is present on a dielectric layer, and etching the germanium containing layer of the substrate to provide a first region including a germanium containing fin structure and a second region including a mandrel structure. A first gate structure may be formed on the germanium containing fin structures. A III-V fin structure may then be formed on the sidewalls of the mandrel structure. The mandrel structure may be removed. A second gate structure may be formed on the III-V fin structure.
Public/Granted literature
- US20140327045A1 METHOD TO MAKE DUAL MATERIAL FINFET ON SAME SUBSTRATE Public/Granted day:2014-11-06
Information query
IPC分类: