Invention Grant
- Patent Title: Patterning
- Patent Title (中): 图案化
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Application No.: US13808268Application Date: 2011-07-04
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Publication No.: US09048372B2Publication Date: 2015-06-02
- Inventor: Hans-Frieder Schleiermacher , Birger Zimmermann , Michael Niggemann
- Applicant: Hans-Frieder Schleiermacher , Birger Zimmermann , Michael Niggemann
- Applicant Address: GB DE
- Assignee: Cambridge Enterprise Limited,Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Current Assignee: Cambridge Enterprise Limited,Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Current Assignee Address: GB DE
- Agency: Hartman Global IP Law
- Agent Gary M. Hartman; Domenica N. S. Hartman
- Priority: GB1011282.9 20100705
- International Application: PCT/GB2011/051259 WO 20110704
- International Announcement: WO2012/004590 WO 20120112
- Main IPC: C03C15/00
- IPC: C03C15/00 ; C03C25/68 ; H01L31/18 ; H01L21/311 ; H01L21/3213 ; B82Y10/00 ; H01L51/00 ; C23F1/00 ; B05C5/02 ; H01L51/42
Abstract:
A method for patterning an article, the article comprising a first layer of a first material, the method comprising providing a thread carrying a first species, e.g. a solvent in which the first material is soluble, and contacting the thread with the first layer to remove at least part of the first layer.
Public/Granted literature
- US20130200044A1 PATTERNING Public/Granted day:2013-08-08
Information query
