Invention Grant
- Patent Title: Sensor element, sensor device, and electronic apparatus
- Patent Title (中): 传感器元件,传感器装置和电子设备
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Application No.: US13785165Application Date: 2013-03-05
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Publication No.: US09048418B2Publication Date: 2015-06-02
- Inventor: Tomotaka Asari
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2012-056457 20120313
- Main IPC: H01L41/113
- IPC: H01L41/113 ; G01C19/5607 ; G01C19/5621

Abstract:
A sensor element includes a base part, a detection vibrating arm extended from the base part, and detection parts that are provided on the detection vibrating arm and detect flexural vibration of the detection vibrating arm, the detection parts each have a first electrode layer, a second electrode layer provided at an opposite side to the detection vibrating arm with respect to the first electrode layer, and a piezoelectric layer provided between the first electrode layer and the second electrode layer, and the detection parts have parts provided over boundary parts between the detection vibrating arm and the base part and the parts bend or curve to extend in a direction including a direction component orthogonal to an extension direction of the detection vibrating arm along side surfaces of the detection vibrating arm and the base part.
Public/Granted literature
- US20130241353A1 SENSOR ELEMENT, SENSOR DEVICE, AND ELECTRONIC APPARATUS Public/Granted day:2013-09-19
Information query
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