Invention Grant
US09048807B2 Surface acoustic wave resonator with an open circuit grating for high temperature environments 有权
具有高温环境的开路光栅的表面声波谐振器

Surface acoustic wave resonator with an open circuit grating for high temperature environments
Abstract:
Surface acoustic wave resonators for use in high temperature applications including a piezoelectric substrate, at least one interdigital transducer supported by the piezoelectric substrate, and a grating reflector supported by the piezoelectric substrate, the grating reflector being fabricated of a heavy metal and comprising a plurality of electrodes, at least one electrode of the plurality of electrodes being electrically isolated from at least one other electrode. Methods of making surface acoustic wave resonators are also included.
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