Invention Grant
- Patent Title: Surface acoustic wave resonator with an open circuit grating for high temperature environments
- Patent Title (中): 具有高温环境的开路光栅的表面声波谐振器
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Application No.: US13050389Application Date: 2011-03-17
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Publication No.: US09048807B2Publication Date: 2015-06-02
- Inventor: Mauricio Pereira Da Cunha , Bennet Meulendyk
- Applicant: Mauricio Pereira Da Cunha , Bennet Meulendyk
- Applicant Address: US ME Bangor
- Assignee: University of Maine System Board of Trustees
- Current Assignee: University of Maine System Board of Trustees
- Current Assignee Address: US ME Bangor
- Agency: Choate, Hall & Stewart LLP
- Main IPC: H03H9/25
- IPC: H03H9/25 ; H03H9/145 ; H03H9/02

Abstract:
Surface acoustic wave resonators for use in high temperature applications including a piezoelectric substrate, at least one interdigital transducer supported by the piezoelectric substrate, and a grating reflector supported by the piezoelectric substrate, the grating reflector being fabricated of a heavy metal and comprising a plurality of electrodes, at least one electrode of the plurality of electrodes being electrically isolated from at least one other electrode. Methods of making surface acoustic wave resonators are also included.
Public/Granted literature
- US20110278985A1 SURFACE ACOUSTIC WAVE RESONATOR WITH AN OPEN CIRCUIT GRATING FOR HIGH TEMPERATURE ENVIRONMENTS Public/Granted day:2011-11-17
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