Invention Grant
- Patent Title: Method of manufacturing switchable filters
- Patent Title (中): 制造可切换过滤器的方法
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Application No.: US13342375Application Date: 2012-01-03
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Publication No.: US09048809B2Publication Date: 2015-06-02
- Inventor: James W. Adkisson , Panglijen Candra , Thomas J. Dunbar , Jeffrey P. Gambino , Mark D. Jaffe , Anthony K. Stamper , Randy L. Wolf
- Applicant: James W. Adkisson , Panglijen Candra , Thomas J. Dunbar , Jeffrey P. Gambino , Mark D. Jaffe , Anthony K. Stamper , Randy L. Wolf
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Anthony Canale
- Main IPC: H03H3/08
- IPC: H03H3/08 ; H03H9/05 ; H03H9/10 ; H01L41/09 ; H03H9/64

Abstract:
Switchable and/or tunable filters and methods of manufacture. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam formed above the piezoelectric substrate and at a location in which, upon actuation, the MEMS beam shorts the piezoelectric filter structure by contacting at least one of the plurality of electrodes.
Public/Granted literature
- US20130169383A1 SWITCHABLE FILTERS AND DESIGN STRUCTURES Public/Granted day:2013-07-04
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