Invention Grant
- Patent Title: Laser dicing method
- Patent Title (中): 激光切割方法
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Application No.: US13929472Application Date: 2013-06-27
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Publication No.: US09050683B2Publication Date: 2015-06-09
- Inventor: Shoichi Sato
- Applicant: Toshiba Kikai Kabushiki Kaisha
- Applicant Address: JP Chiyoda-ku, Tokyo
- Assignee: Toshiba Kikai Kabushiki Kaisha
- Current Assignee: Toshiba Kikai Kabushiki Kaisha
- Current Assignee Address: JP Chiyoda-ku, Tokyo
- Agency: DLA Piper LLP (US)
- Priority: JP2012-147728 20120629
- Main IPC: H01L21/00
- IPC: H01L21/00 ; B23K26/00 ; B23K26/06 ; B23K26/08 ; B23K26/36 ; B23K26/40 ; C03C23/00 ; H01L33/00

Abstract:
A laser dicing method of a work piece on a surface of which a metal film is provided, includes: a first metal film removing of irradiating a pulse laser beam defocused from the metal film, along a first line, and removing the metal film; a second metal film removing of irradiating the pulse laser beam defocused from the metal film, along a second line orthogonal to the first line, and removing the metal film; and a crack forming of irradiating the pulse laser beam in an area from which the metal film of the work piece is removed, and forming the crack in the work piece, and, in an area in which the first line and the second line cross, irradiation of the pulse laser beam is interrupted in the first metal film removing or the second metal film removing.
Public/Granted literature
- US20140004639A1 LASER DICING METHOD Public/Granted day:2014-01-02
Information query
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