Invention Grant
- Patent Title: Manufacturing method of carrier for double-side polishing apparatus, carrier for double-side polishing apparatus, and double-side polishing method of wafer
- Patent Title (中): 双面抛光装置的载体的制造方法,双面研磨装置的载体和晶片的双面研磨方法
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Application No.: US13379482Application Date: 2010-06-18
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Publication No.: US09050698B2Publication Date: 2015-06-09
- Inventor: Taichi Yasuda , Tatsuo Enomoto
- Applicant: Taichi Yasuda , Tatsuo Enomoto
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2009-170138 20090721
- International Application: PCT/JP2010/004077 WO 20100618
- International Announcement: WO2011/010423 WO 20110127
- Main IPC: B24B37/28
- IPC: B24B37/28

Abstract:
A manufacturing method of a carrier for a double-side polishing apparatus for polishing surfaces of a wafer, the carrier having: a carrier body arranged between upper and lower turn tables, the carrier body having a holding hole for holding the wafer; and a ring-shaped resin insert arranged along an inner circumference of the holding hole, the resin insert having an inner circumferential surface to be brought into contact with a peripheral portion of the wafer to be held, the method having the steps of attaching, to the holding hole of the carrier body, a base material for the resin insert not having the inner circumferential surface to be brought into contact with the wafer to be held, and performing inner-circumferential-surface-forming processing on the base material for the resin insert to form the inner circumferential surface to be brought into contact with the peripheral portion of the wafer to be held.
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