Invention Grant
US09050798B2 Ink-jet head and manufacturing method of the same 有权
喷墨头及其制造方法相同

Ink-jet head and manufacturing method of the same
Abstract:
According to embodiments, a manufacturing method for an ink-jet head is disclosed. The method comprises forming an ink pressure chamber, forming an oscillating plate, and forming, on the oscillating plate, a first electrode having a predetermined footprint. The method further comprises forming, on the oscillating plate and on the first electrode, a piezoelectric film having a footprint that is geometrically similar to the predetermined footprint, forming, on the oscillating plate and the piezoelectric film, a second electrode having a footprint that is geometrically similar to the predetermined footprint, and forming a nozzle in the oscillating plate.
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