Invention Grant
US09050805B2 Process for producing liquid ejection head and process for producing substrate for liquid ejection head including repeated metal layer, Si layer, N layer laminations
有权
用于制造液体喷射头的方法和用于制备包括重复金属层,Si层,N层叠层的液体喷射头基材的方法
- Patent Title: Process for producing liquid ejection head and process for producing substrate for liquid ejection head including repeated metal layer, Si layer, N layer laminations
- Patent Title (中): 用于制造液体喷射头的方法和用于制备包括重复金属层,Si层,N层叠层的液体喷射头基材的方法
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Application No.: US14196159Application Date: 2014-03-04
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Publication No.: US09050805B2Publication Date: 2015-06-09
- Inventor: Makoto Sakurai , Takuya Hatsui , Souta Takeuchi , Takeru Yasuda , Soichiro Nagamochi
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2013-051814 20130314
- Main IPC: B41J2/05
- IPC: B41J2/05 ; B41J2/16 ; B41J2/14

Abstract:
The invention provides a liquid ejection head including a member in which an ejection orifice for ejecting a liquid is formed, and a substrate to which the member is joined. The substrate has a heat storage layer containing a silicon compound and an energy-generating element provided at a position corresponding to the ejection orifice for generating heat by electrification to eject the liquid from the ejection orifice. The energy-generating element has a laminate having a metal layer formed of tantalum or tungsten, an Si layer laminated on the metal layer and formed of silicon and an N layer laminated on the Si layer and formed of nitrogen, and the metal layer is in contact with the heat storage layer.
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