Invention Grant
US09050805B2 Process for producing liquid ejection head and process for producing substrate for liquid ejection head including repeated metal layer, Si layer, N layer laminations 有权
用于制造液体喷射头的方法和用于制备包括重复金属层,Si层,N层叠层的液体喷射头基材的方法

Process for producing liquid ejection head and process for producing substrate for liquid ejection head including repeated metal layer, Si layer, N layer laminations
Abstract:
The invention provides a liquid ejection head including a member in which an ejection orifice for ejecting a liquid is formed, and a substrate to which the member is joined. The substrate has a heat storage layer containing a silicon compound and an energy-generating element provided at a position corresponding to the ejection orifice for generating heat by electrification to eject the liquid from the ejection orifice. The energy-generating element has a laminate having a metal layer formed of tantalum or tungsten, an Si layer laminated on the metal layer and formed of silicon and an N layer laminated on the Si layer and formed of nitrogen, and the metal layer is in contact with the heat storage layer.
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