Invention Grant
- Patent Title: Method for manufacturing a hermetically sealed structure
- Patent Title (中): 密封结构的制造方法
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Application No.: US13639423Application Date: 2011-04-15
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Publication No.: US09051172B2Publication Date: 2015-06-09
- Inventor: Gjermund Kittilsland , Daniel Lapadatu , Sissel Jacobsen , Trond Westgaard
- Applicant: Gjermund Kittilsland , Daniel Lapadatu , Sissel Jacobsen , Trond Westgaard
- Applicant Address: NO
- Assignee: SensoNor AS
- Current Assignee: SensoNor AS
- Current Assignee Address: NO
- Agency: Hovey Williams LLP
- Priority: EP10160200 20100416
- International Application: PCT/EP2011/056054 WO 20110415
- International Announcement: WO2011/128446 WO 20111020
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B81B7/00

Abstract:
A method for providing hermetic sealing within a silicon-insulator composite wafer for manufacturing a hermetically sealed structure, comprising the steps of: patterning a first silicon wafer to have one or more recesses that extend at least partially through the first silicon wafer; filling said recesses with an insulator material able to be anodically bonded to silicon to form a first composite wafer having a plurality of silicon-insulator interfaces and a first contacting surface consisting of insulator material; and using an anodic bonding technique on the first contacting surface and an opposing second contacting surface to create hermetic sealing between the silicon-insulator interfaces, wherein the second contacting surface consists of silicon.
Public/Granted literature
- US20130146994A1 METHOD FOR MANUFACTURING A HERMETICALLY SEALED STRUCTURE Public/Granted day:2013-06-13
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