Invention Grant
US09051173B2 Treatment method of a getter material and encapsulation method of such getter material
有权
吸气材料的处理方法和这种吸气材料的包封方法
- Patent Title: Treatment method of a getter material and encapsulation method of such getter material
- Patent Title (中): 吸气材料的处理方法和这种吸气材料的包封方法
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Application No.: US12898094Application Date: 2010-10-05
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Publication No.: US09051173B2Publication Date: 2015-06-09
- Inventor: Xavier Baillin , Emmanuelle Lagoutte , Guillaume Rodriguez
- Applicant: Xavier Baillin , Emmanuelle Lagoutte , Guillaume Rodriguez
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0956997 20091007
- Main IPC: H05K5/00
- IPC: H05K5/00 ; B05D5/12 ; B81C1/00 ; H01J29/94 ; H01L23/10 ; H01L23/26
Abstract:
A treatment method for a getter material is provided, including forming a protective layer on the thin layer getter material by performing at least one oxidation and/or nitriding step of the thin layer getter material conducted under dry atmosphere of dioxygen and/or dinitrogen, wherein the protective layer is composed of oxide and/or nitride of the thin layer getter material, and wherein a thickness of the protective layer is between approximately 1 nm and 10 nm.
Public/Granted literature
- US20110079425A1 TREATMENT METHOD OF A GETTER MATERIAL AND ENCAPSULATION METHOD OF SUCH GETTER MATERIAL Public/Granted day:2011-04-07
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