Invention Grant
US09051251B2 Salt, photoresist composition and method for producing photoresist pattern
有权
盐,光致抗蚀剂组合物和制造光致抗蚀剂图案的方法
- Patent Title: Salt, photoresist composition and method for producing photoresist pattern
- Patent Title (中): 盐,光致抗蚀剂组合物和制造光致抗蚀剂图案的方法
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Application No.: US13569787Application Date: 2012-08-08
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Publication No.: US09051251B2Publication Date: 2015-06-09
- Inventor: Tatsuro Masuyama , Yuichi Mukai
- Applicant: Tatsuro Masuyama , Yuichi Mukai
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2011-175681 20110811
- Main IPC: G03F7/004
- IPC: G03F7/004 ; C07C309/17 ; C07C309/08 ; C07C381/12 ; G03F7/20

Abstract:
A photoresist composition which comprises a salt represented by formula (I): wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, R1, R2 and R3 each independently represent a hydrogen atom or a C1-C10 monovalent aliphatic saturated hydrocarbon group, X1 and X2 each independently represent a single bond, a carbonyl group, or a C1-C10 divalent aliphatic saturated hydrocarbon group where a hydrogen atom can be replaced by a hydroxy group and where a methylene group can be replaced by an oxygen atom, a sulfonyl group or a carbonyl group, A1 represents a C1-C30 organic group, m1 represents an integer of 1 to 4, and Z+ represents an organic cation, and a resin which is hardly soluble or insoluble but soluble in an aqueous alkali solution by action of an acid.
Public/Granted literature
- US20130040237A1 SALT, PHOTORESIST COMPOSITION AND METHOD FOR PRODUCING PHOTORESIST PATTERN Public/Granted day:2013-02-14
Information query
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