Invention Grant
- Patent Title: Substrate firing device
- Patent Title (中): 基板点火装置
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Application No.: US12458184Application Date: 2009-07-02
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Publication No.: US09052145B2Publication Date: 2015-06-09
- Inventor: Won-Woong Jung , Hyun-Cheul Shin
- Applicant: Won-Woong Jung , Hyun-Cheul Shin
- Applicant Address: KR Giheung-Gu, Yongin, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Giheung-Gu, Yongin, Gyeonggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2008-0063872 20080702
- Main IPC: H01L21/324
- IPC: H01L21/324 ; F27B17/00 ; F27B5/04 ; F27B5/14 ; F27D5/00

Abstract:
A substrate firing device having an increased contact area between the substrate and substrate support portions, thereby preventing the substrate support portions from generating scratches on the substrate when the substrate expands and contracts due to heating and cooling. By increasing the contact area to the substrate and by using quartz on items that contact the substrate, it is possible to prevent scratches occurring on a substrate, even after an etching process of the substrate, thereby improving quality of the slimmer final product.
Public/Granted literature
- US20100003629A1 Substrate firing device Public/Granted day:2010-01-07
Information query
IPC分类: