Invention Grant
- Patent Title: Device for measuring the positioning of a microactuator
- Patent Title (中): 用于测量微致动器定位的装置
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Application No.: US13575336Application Date: 2011-01-17
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Publication No.: US09052218B2Publication Date: 2015-06-09
- Inventor: David Heriban , Joël Agnus , Ronan Noizet
- Applicant: David Heriban , Joël Agnus , Ronan Noizet
- Applicant Address: FR Besancon FR Paris FR Besancon FR Ecole Valentin
- Assignee: UNIVERSITE DE FRANCHE COMTE,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS,ECOLE NATIONALE SUPERIEURE DE MECANIQUE ET DES MICROTECHNIQUES,David Heriban
- Current Assignee: UNIVERSITE DE FRANCHE COMTE,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS,ECOLE NATIONALE SUPERIEURE DE MECANIQUE ET DES MICROTECHNIQUES,David Heriban
- Current Assignee Address: FR Besancon FR Paris FR Besancon FR Ecole Valentin
- Agency: Young & Thompson
- Priority: FR1000307 20100127
- International Application: PCT/FR2011/000028 WO 20110117
- International Announcement: WO2011/092396 WO 20110804
- Main IPC: G01B7/14
- IPC: G01B7/14 ; G01D5/14

Abstract:
A microtechnique device includes an actuator, designed to move movable equipment with a permanent magnet with respect to a support. The actuator is designed to move the movable equipment in two degrees of freedom from a position of rest, and the permanent magnet is chosen to have a magnetic field distribution that presents a main plane of symmetry and a main direction of magnetization passing through a center. The device includes a first magnetic sensor and a second magnetic sensor, these two being designed to detect a movement of the magnet. The sensors are positioned with respect to the position of rest of the magnet in a specific manner in the main plane of symmetry of the magnetic field and near to extrema. The first and second sensors are then sensitive to the movements of the movable equipment perpendicular to their respective working axes.
Public/Granted literature
- US20130027027A1 DEVICE FOR MEASURING THE POSITIONNING OF A MICROACTUATOR Public/Granted day:2013-01-31
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