Invention Grant
US09052272B2 Device for analising a radiating material using a microprobe 有权
使用微探针分析辐射材料的装置

Device for analising a radiating material using a microprobe
Abstract:
The invention relates to an analysis device comprising a main enclosure fitted with a secondary enclosure, a microprobe placed inside the main enclosure and fitted with an airlock and with a motion object, and a movable sample support that is movable from the secondary enclosure to the airlock and from the airlock to the motion object. Each of the airlock and the motion object includes a respective guide member for guiding the movable sample support and a respective sensor for detecting the presence of the movable sample support.
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