Invention Grant
US09052333B2 Sensor capable of measuring acceleration, angular velocity, and DC acceleration 有权
能够测量加速度,角速度和直流加速度的传感器

Sensor capable of measuring acceleration, angular velocity, and DC acceleration
Abstract:
Disclosed herein is an inertial sensor including: a membrane; a mass body provided under the membrane; a plurality of patterned magnets provided under the mass body; and a magnetoresistive element provided to be spaced apart from the mass body and measuring static DC acceleration acting on the mass body through resistance changed according to magnetic fields of the plurality of patterned magnets. The plurality of patterned magnets and the magnetoresistive element are included, thereby making it possible to measure static DC acceleration (particularly, gravity acceleration) that is difficult to measure using an existing to piezoelectric element.
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