Invention Grant
- Patent Title: Acceleration sensor
- Patent Title (中): 加速度传感器
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Application No.: US13511466Application Date: 2010-11-17
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Publication No.: US09052334B2Publication Date: 2015-06-09
- Inventor: Hitoshi Yosida , Yuji Suzuki
- Applicant: Hitoshi Yosida , Yuji Suzuki
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: Bacon & Thomas, PLLC
- Priority: JP2009-266584 20091124
- International Application: PCT/IB2010/002947 WO 20101117
- International Announcement: WO2011/064641 WO 20110603
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L21/00 ; G01P15/125 ; G01P15/08 ; G01P15/18

Abstract:
In an acceleration sensor, a sensor unit includes a weight portion having a recess section with one open surface and a solid section one-piece formed with the recess section, beam portions for rotatably supporting the weight portion such that the recess section and the solid section are arranged along a rotation direction, a movable electrode, fixed electrodes, detection electrodes electrically connected to the fixed electrodes to detect a capacitance between the movable electrode and the fixed electrodes. A fixed plate is arranged in a spaced-apart relationship with a surface of the weight portion on which the movable electrode is provided, and embedment electrodes are embedded in the fixed plate to extend along a thickness direction of the fixed plate, the embedment electrodes having one end portions facing the movable electrode to serve as the fixed electrodes and the other end portions configured to serve as the detection electrodes.
Public/Granted literature
- US20120280334A1 ACCELERATION SENSOR Public/Granted day:2012-11-08
Information query
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