Invention Grant
- Patent Title: Inert gas delivery system for electrical inspection apparatus
- Patent Title (中): 电气检测仪器惰性气体输送系统
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Application No.: US14082603Application Date: 2013-11-18
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Publication No.: US09052338B2Publication Date: 2015-06-09
- Inventor: Terence Lawrence Kane , Richard Walter Oldrey , Michael P. Tenney
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Howard M. Cohn; William H. Steinberg
- Main IPC: G01Q30/12
- IPC: G01Q30/12 ; G01Q70/02 ; G01D3/08 ; G01D18/00 ; G01D11/30 ; G02B21/34 ; G02B27/00 ; G01F25/00 ; G01R31/28
Abstract:
An apparatus for electrical inspection is disclosed. The apparatus comprises an inert gas delivery system that delivers inert gas near a microscope imaging element and electrical test probes. A gas supply provides an inert gas such as argon or nitrogen. The inert gas displaces oxygen to prevent premature oxidation of the test probes. In one embodiment, one or more delivery tubes deliver inert gas to the measurement area.
Public/Granted literature
- US20140069165A1 INERT GAS DELIVERY SYSTEM FOR ELECTRICAL INSPECTION APPARATUS Public/Granted day:2014-03-13
Information query
