Invention Grant
US09052342B2 Probe with cantilevered beam having solid and hollow sections 有权
探头具有实心和中空部分的悬臂梁

  • Patent Title: Probe with cantilevered beam having solid and hollow sections
  • Patent Title (中): 探头具有实心和中空部分的悬臂梁
  • Application No.: US13250756
    Application Date: 2011-09-30
  • Publication No.: US09052342B2
    Publication Date: 2015-06-09
  • Inventor: Li FanRui Xu
  • Applicant: Li FanRui Xu
  • Applicant Address: US CA Livermore
  • Assignee: FormFactor, Inc.
  • Current Assignee: FormFactor, Inc.
  • Current Assignee Address: US CA Livermore
  • Agent N. Kenneth Burraston; Kirton McConkie
  • Main IPC: G01R31/00
  • IPC: G01R31/00 G01R1/067
Probe with cantilevered beam having solid and hollow sections
Abstract:
An electrically conductive probe can comprise a post to which a beam structure is attached. The beam structure can comprise a cantilevered portion that extends away from the post to a free end to which a contact structure can be attached. The cantilevered portion of the beam can include both a solid section and a hollow section. Multiple such probes can be used in a test contactor to make electrical connections with an electronic device such as a semiconductor die or dies to be tested.
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