Invention Grant
- Patent Title: Probe with cantilevered beam having solid and hollow sections
- Patent Title (中): 探头具有实心和中空部分的悬臂梁
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Application No.: US13250756Application Date: 2011-09-30
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Publication No.: US09052342B2Publication Date: 2015-06-09
- Inventor: Li Fan , Rui Xu
- Applicant: Li Fan , Rui Xu
- Applicant Address: US CA Livermore
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Current Assignee Address: US CA Livermore
- Agent N. Kenneth Burraston; Kirton McConkie
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R1/067

Abstract:
An electrically conductive probe can comprise a post to which a beam structure is attached. The beam structure can comprise a cantilevered portion that extends away from the post to a free end to which a contact structure can be attached. The cantilevered portion of the beam can include both a solid section and a hollow section. Multiple such probes can be used in a test contactor to make electrical connections with an electronic device such as a semiconductor die or dies to be tested.
Public/Granted literature
- US20130082729A1 Probe With Cantilevered Beam Having Solid And Hollow Sections Public/Granted day:2013-04-04
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