Invention Grant
- Patent Title: Integrated circuit coupling system with waveguide circuitry and method of manufacture thereof
- Patent Title (中): 具有波导电路的集成电路耦合系统及其制造方法
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Application No.: US13728966Application Date: 2012-12-27
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Publication No.: US09052460B2Publication Date: 2015-06-09
- Inventor: Jongik Won , Hsiang En Tseng , Luis Martinez , Anthony J. Ticknor
- Applicant: NeoPhotonics Corporation
- Applicant Address: US CA San Jose
- Assignee: NeoPhotonics Corporation
- Current Assignee: NeoPhotonics Corporation
- Current Assignee Address: US CA San Jose
- Agency: Ishimaru & Associates LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; G02B6/26 ; G02B6/34 ; G02B6/136 ; G02B6/30 ; G02B6/42

Abstract:
A method of manufacture of an integrated circuit coupling system includes: forming a waveguide assembly, having a top clad over an open end of an optical core; forming a first photoresist having a base photoresist pattern shape with sloped photoresist sidewalls tapered down to expose a portion of the top clad; forming a recess having clad sidewalls from the portion of the top clad exposed by the base photoresist pattern shape, the clad sidewalls having a shape replicating a shape of the base photo resist pattern shape; and forming an optical vertical insertion area, from the clad sidewalls forming the recess, having a pocket trench, a horizontal step, and a mirror with a reflective material selectively applied to a section of the clad sidewalls and exposing the open end opposite to the mirror, the horizontal step between the mirror and the pocket trench.
Public/Granted literature
- US20130163918A1 INTEGRATED CIRCUIT COUPLING SYSTEM WITH WAVEGUIDE CIRCUITRY AND METHOD OF MANUFACTURE THEREOF Public/Granted day:2013-06-27
Information query
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