Invention Grant
- Patent Title: Micromechanical component and manufacturing method for a micromechanical component
- Patent Title (中): 微机械部件的微机械部件和制造方法
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Application No.: US13134021Application Date: 2011-05-25
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Publication No.: US09052510B2Publication Date: 2015-06-09
- Inventor: Steffi Lindenkreuz , Gerhard Kiesewetter , Stefan Pinter , Joerg Muchow
- Applicant: Steffi Lindenkreuz , Gerhard Kiesewetter , Stefan Pinter , Joerg Muchow
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102010029539 20100601
- Main IPC: G02B7/182
- IPC: G02B7/182 ; G02B26/08 ; G02B26/10 ; G02B26/12 ; B81B3/00
Abstract:
A micromechanical component has a holding device and an adjustable component, which is adjustable with respect to the holding device at least from a first position into a second position, and which is connected via at least one spring to the holding device. The micromechanical component also includes at least one silicide-containing line segment situated on the at least one spring.
Public/Granted literature
- US20110292529A1 Micromechanical component and manufacturing method for a micromechanical component Public/Granted day:2011-12-01
Information query
