Invention Grant
- Patent Title: Maskless exposure apparatus and method
- Patent Title (中): 无掩模曝光装置及方法
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Application No.: US12923922Application Date: 2010-10-14
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Publication No.: US09052599B2Publication Date: 2015-06-09
- Inventor: Sung Min Ahn , Sang Don Jang
- Applicant: Sung Min Ahn , Sang Don Jang
- Applicant Address: KR Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2009-0110437 20091116
- Main IPC: G01B11/00
- IPC: G01B11/00 ; G03B27/32 ; G03B27/54 ; H02K41/02 ; G03F7/20 ; G03F9/00

Abstract:
Example embodiments are directed to a maskless exposure apparatus using off-axis alignment to form a virtual mask pattern on a substrate. The maskless exposure apparatus includes a movement unit on which the substrate is placed, a light source unit configured to output light, a projection unit configured to divide the light output from the light source unit into a plurality of spot beams to form the pattern and configured to project the spot beams to the movement unit, an alignment unit configured to output alignment light to align the substrate and a virtual mask, a beam imaging unit configured to capture the spot beams and the alignment light, and a controller configured to measure distances between the captured alignment light and at least two of the captured spot beams and configured to determine alignment between the virtual mask and the substrate based on the measured distances to control movement of the movement unit.
Public/Granted literature
- US20110116064A1 Maskless exposure apparatus and method Public/Granted day:2011-05-19
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