Invention Grant
US09052604B2 Photolithography systems and associated alignment correction methods 有权
光刻系统和相关的对准校正方法

Photolithography systems and associated alignment correction methods
Abstract:
Several embodiments of photolithography systems and associated methods of alignment correction are disclosed herein. In one embodiment, a method for correcting alignment errors in a photolithography system includes detecting a first alignment error at a first location of a first microelectronic substrate and a second alignment error at a second location of a second microelectronic substrate. The second location generally corresponds to the first location. The method also includes deriving a statistical dispersion between the first alignment error and the second alignment error and associating the first and second locations with an alignment procedure based on the derived statistical dispersion.
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