Invention Grant
- Patent Title: Photolithography systems and associated alignment correction methods
- Patent Title (中): 光刻系统和相关的对准校正方法
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Application No.: US12266202Application Date: 2008-11-06
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Publication No.: US09052604B2Publication Date: 2015-06-09
- Inventor: Woong Jae Chung
- Applicant: Woong Jae Chung
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Perkins Coie LLP
- Main IPC: G03F9/00
- IPC: G03F9/00

Abstract:
Several embodiments of photolithography systems and associated methods of alignment correction are disclosed herein. In one embodiment, a method for correcting alignment errors in a photolithography system includes detecting a first alignment error at a first location of a first microelectronic substrate and a second alignment error at a second location of a second microelectronic substrate. The second location generally corresponds to the first location. The method also includes deriving a statistical dispersion between the first alignment error and the second alignment error and associating the first and second locations with an alignment procedure based on the derived statistical dispersion.
Public/Granted literature
- US20100114522A1 PHOTOLITHOGRAPHY SYSTEMS AND ASSOCIATED ALIGNMENT CORRECTION METHODS Public/Granted day:2010-05-06
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