Invention Grant
US09052614B2 Vibration control apparatus, lithography apparatus, and method of manufacturing article 有权
振动控制装置,光刻装置及其制造方法

Vibration control apparatus, lithography apparatus, and method of manufacturing article
Abstract:
A vibration control apparatus includes a first spring mechanism to support a first object as part of a first system. To control vibration of the first object, a first actuator applies a force to the first object via a command value generated by a first computing based on an output of a detection system. The detection system includes a second spring mechanism to support a second object as part of a second system. A third spring mechanism supports a third object as part of a third system. The first displacement detector detects displacement of the third object relative to the second object. The third object is prevented from being displaced relative to the second object. A second natural frequency of the second system is higher than a first natural frequency of the first system, and a third natural frequency of a third system is higher than the first natural frequency.
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