Invention Grant
- Patent Title: Vibration control apparatus, lithography apparatus, and method of manufacturing article
- Patent Title (中): 振动控制装置,光刻装置及其制造方法
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Application No.: US13280243Application Date: 2011-10-24
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Publication No.: US09052614B2Publication Date: 2015-06-09
- Inventor: Ryo Nawata , Katsumi Asada
- Applicant: Ryo Nawata , Katsumi Asada
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA, Inc., IP Division
- Priority: JP2010-244365 20101029
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A vibration control apparatus includes a first spring mechanism to support a first object as part of a first system. To control vibration of the first object, a first actuator applies a force to the first object via a command value generated by a first computing based on an output of a detection system. The detection system includes a second spring mechanism to support a second object as part of a second system. A third spring mechanism supports a third object as part of a third system. The first displacement detector detects displacement of the third object relative to the second object. The third object is prevented from being displaced relative to the second object. A second natural frequency of the second system is higher than a first natural frequency of the first system, and a third natural frequency of a third system is higher than the first natural frequency.
Public/Granted literature
- US20120105820A1 VIBRATION CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2012-05-03
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