Invention Grant
US09053288B1 Layout checking system for multiple-patterning group assignment constraints 有权
用于多图案化组分配约束的布局检查系统

Layout checking system for multiple-patterning group assignment constraints
Abstract:
A method includes extracting multiple-patterning group assignment information of one or more layout patterns from a layout design. The layout design corresponds to a circuit design, and the one or more layout patterns corresponding to a node of the circuit design. Whether the extracted multiple-patterning group assignment information is consistent with a set of multiple-patterning group assignment constraints of the node is determined by a hardware processor.
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