Invention Grant
- Patent Title: Automated inspection scenario generation
- Patent Title (中): 自动检测场景生成
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Application No.: US13585115Application Date: 2012-08-14
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Publication No.: US09053390B2Publication Date: 2015-06-09
- Inventor: Mohan Mahadevan , Govind Thattaisundaram , Ajay Gupta , Chien-Huei (Adam) Chen , Jason Kirkwood , Ashok Kulkarni , Songnian Rong , Ernesto Escorcia , Eugene Shifrin
- Applicant: Mohan Mahadevan , Govind Thattaisundaram , Ajay Gupta , Chien-Huei (Adam) Chen , Jason Kirkwood , Ashok Kulkarni , Songnian Rong , Ernesto Escorcia , Eugene Shifrin
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Spano Law Group
- Agent Joseph S. Spano
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06K9/62 ; G06T7/00

Abstract:
Methods and systems for determining inspection scenarios without input from a user are presented. Inspection scenarios include at least one acquisition mode, defect detection parameter values, and classification parameter values. In one example, a number of defect events are determined by a hot inspection of a wafer surface. The defect events are classified and attributes associated with each defect event are identified. The defect events are labeled with this information. Based on the identified attributes and classification, inspection scenarios are determined. The inspection scenarios are solutions in a mathematical space formed by the identified attributes. In some examples, a plurality of inspection scenarios are determined and a desired inspection scenario is selected from the plurality based on the number of defects of interest and the number of nuisance events captured by the selected inspection scenario.
Public/Granted literature
- US20140050389A1 Automated Inspection Scenario Generation Public/Granted day:2014-02-20
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