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US09053732B2 Method of fabricating a perpendicular magnetic recording medium 有权
制造垂直磁记录介质的方法

Method of fabricating a perpendicular magnetic recording medium
Abstract:
A method of forming a perpendicular magnetic recording medium. The perpendicular magnetic recording medium comprises a substrate, an underlayer on the substrate, an intermediate layer on the underlayer and a recording layer on the intermediate layer. The underlayer comprises a first soft underlayer, an antiferromagnetically coupled Ru layer on the first soft underlayer, a second soft underlayer on the antiferromagnetically coupled Ru layer, and an orientation control layer on the second soft underlayer, the method comprises applying a negative bias voltage to the substrate during formation of the underlayer.
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