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US09053834B2 Silicon carbide single crystal and manufacturing method of the same 有权
碳化硅单晶及其制造方法相同

Silicon carbide single crystal and manufacturing method of the same
Abstract:
A silicon carbide single crystal includes nitrogen as a dopant and aluminum as a dopant. A nitrogen concentration is 2×1019 cm−3 or higher and a ratio of an aluminum concentration to the nitrogen concentration is within a range of 5% to 40%.
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