Invention Grant
- Patent Title: Polycrystalline silicon wafer
- Patent Title (中): 多晶硅片
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Application No.: US14381431Application Date: 2013-02-20
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Publication No.: US09053942B2Publication Date: 2015-06-09
- Inventor: Hiroshi Takamura , Ryo Suzuki
- Applicant: JX Nippon Mining & Metals Corporation
- Applicant Address: JP Tokyo
- Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee Address: JP Tokyo
- Agency: Howson & Howson LLP
- Priority: JP2012-054826 20120312
- International Application: PCT/JP2013/054081 WO 20130220
- International Announcement: WO2013/136922 WO 20130919
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L29/16 ; H01L29/06

Abstract:
A polycrystalline silicon wafer produced based on a melting method and having an outer diameter of 450 mm or more, wherein a depth of scratches on the polycrystalline silicon wafer is 10 μm or less. A polycrystalline silicon wafer produced based on a melting method and having an outer diameter of 450 mm or more, wherein a maximum number of scratches having a width of 40 μm or more and 100 μm or less and a depth of more than 10 μm and 40 μm or less formed on the polycrystalline silicon wafer is one or less per section when the overall polycrystalline silicon wafer is divided into 100 mm-square sections, and a depth of remaining scratches is 10 μm or less. Provided is a large polycrystalline silicon wafer, particularly a silicon wafer having a wafer size in which the outer diameter is 450 mm or more, in which a small number of scratches are generated on the wafer surface and which has mechanical properties similar to those of a monocrystalline silicon wafer.
Public/Granted literature
- US20150108490A1 Polycrystalline Silicon Wafer Public/Granted day:2015-04-23
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