Invention Grant
- Patent Title: Methods for forming guard rings on fin structures
- Patent Title (中): 在翅片结构上形成保护环的方法
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Application No.: US14166510Application Date: 2014-01-28
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Publication No.: US09053947B2Publication Date: 2015-06-09
- Inventor: Chia-Hsin Hu , Min-Chang Liang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L29/06 ; H01L27/088 ; H01L21/762 ; H01L29/417 ; H01L29/66 ; H01L29/78 ; H01L23/485

Abstract:
A method includes forming a gate stack over a semiconductor fin, wherein the semiconductor fin forms a ring, and etching a portion of the semiconductor fin not covered by the gate stack to form a recess. The method further includes performing an epitaxy to grow an epitaxy semiconductor region from the recess, forming a first contact plug overlying and electrically coupled to the epitaxy semiconductor region, and forming a second contact plug, wherein the second contact plug is overlying and electrically coupled to the gate stack.
Public/Granted literature
- US20140141586A1 Guard Rings on Fin Structures Public/Granted day:2014-05-22
Information query
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