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US09053962B2 Semiconductor device and fabrication process thereof 有权
半导体器件及其制造工艺

Semiconductor device and fabrication process thereof
Abstract:
A disclosed semiconductor device includes a semiconductor substrate including a first area, a gate electrode formed over the first area of the semiconductor substrate, a first active region formed in the first area of the semiconductor substrate at a lateral side of the gate electrode, a first silicide layer formed at least on a sidewall surface of the gate electrode in the first area, the first silicide layer is electrically connected to the first active region.
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