Invention Grant
US09053977B2 Nonvolatile memory device with vertical semiconductor pattern between vertical source lines
有权
在垂直源极线之间具有垂直半导体图案的非易失存储器件
- Patent Title: Nonvolatile memory device with vertical semiconductor pattern between vertical source lines
- Patent Title (中): 在垂直源极线之间具有垂直半导体图案的非易失存储器件
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Application No.: US13610781Application Date: 2012-09-11
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Publication No.: US09053977B2Publication Date: 2015-06-09
- Inventor: Eun-Seok Choi , Hyun-Seung Yoo
- Applicant: Eun-Seok Choi , Hyun-Seung Yoo
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2011-0116213 20111109
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L27/115 ; H01L29/66

Abstract:
A non-volatile memory device in accordance with one embodiment of the present invention includes a substrate including a P-type impurity-doped region, a channel structure comprising a plurality of interlayer insulating layers that are alternately stacked with a plurality of channel layers on the substrate, a P-type semiconductor pattern that contacts sidewalls of the plurality of channel layers, wherein a lower end of the P-type semiconductor pattern contacts the P-type impurity-doped region, and source lines that are disposed at both sides of the P-type semiconductor pattern and contact the sidewalls of the plurality of channel layers.
Public/Granted literature
- US20130113033A1 NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2013-05-09
Information query
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