Invention Grant
- Patent Title: Hybrid CMOS nanowire mesh device and PDSOI device
- Patent Title (中): 混合CMOS纳米线网格装置和PDSOI装置
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Application No.: US14194766Application Date: 2014-03-02
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Publication No.: US09053981B2Publication Date: 2015-06-09
- Inventor: Josephine B. Chang , Leland Chang , Chung-Hsun Lin , Jeffrey W. Sleight
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Law Offices of Ira D. Blecker, P.C.
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/28 ; H01L29/78 ; H01L27/088 ; H01L21/84 ; B82Y10/00 ; B82Y40/00 ; H01L29/66 ; H01L29/06 ; H01L29/786

Abstract:
A semiconductor hybrid structure on an SOI substrate. A first portion of the SOI substrate contains a nanowire mesh device and a second portion of the SOI substrate contains a partially depleted semiconductor on insulator (PDSOI) device. The nanowire mesh device includes stacked and spaced apart semiconductor nanowires located on the SOI substrate with each semiconductor nanowire having two end segments in which one of the end segments is connected to a source region and the other end segment is connected to a drain region. The nanowire mesh device further includes a gate region over at least a portion of the stacked and spaced apart semiconductor nanowires. The PDSOI device includes a partially depleted semiconductor layer on the substrate, and a gate region over at least a portion of the partially depleted semiconductor layer.
Public/Granted literature
- US20140175375A1 HYBRID CMOS NANOWIRE MESH DEVICE AND PDSOI DEVICE Public/Granted day:2014-06-26
Information query
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