Invention Grant
- Patent Title: Pixel isolation structures in backside illuminated image sensors
- Patent Title (中): 背面照明图像传感器中的像素隔离结构
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Application No.: US14030548Application Date: 2013-09-18
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Publication No.: US09054004B2Publication Date: 2015-06-09
- Inventor: Shih-I Yang
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsinchu
- Agent Jones Day
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
Systems and methods are provided for fabricating a backside illuminated image sensor including an array of pixels. An example image sensor includes a first pixel, a second pixel, and an isolation structure. The first pixel is disposed in a front side of a substrate and is configured to generate charged carriers in response to light incident upon a backside of the substrate. The second pixel is disposed in the front side of the substrate and is configured to generate charged carriers in response to light incident upon the backside of the substrate. The isolation structure is disposed to separate the second pixel from the first pixel, and extends from the backside of the substrate toward the front side of the substrate. The isolation structure includes a sidewall substantially vertically to the front side of the substrate.
Public/Granted literature
- US20150076648A1 PIXEL ISOLATION STRUCTURES IN BACKSIDE ILLUMINATED IMAGE SENSORS Public/Granted day:2015-03-19
Information query
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