Invention Grant
US09054004B2 Pixel isolation structures in backside illuminated image sensors 有权
背面照明图像传感器中的像素隔离结构

Pixel isolation structures in backside illuminated image sensors
Abstract:
Systems and methods are provided for fabricating a backside illuminated image sensor including an array of pixels. An example image sensor includes a first pixel, a second pixel, and an isolation structure. The first pixel is disposed in a front side of a substrate and is configured to generate charged carriers in response to light incident upon a backside of the substrate. The second pixel is disposed in the front side of the substrate and is configured to generate charged carriers in response to light incident upon the backside of the substrate. The isolation structure is disposed to separate the second pixel from the first pixel, and extends from the backside of the substrate toward the front side of the substrate. The isolation structure includes a sidewall substantially vertically to the front side of the substrate.
Public/Granted literature
Information query
Patent Agency Ranking
0/0