Invention Grant
- Patent Title: Radiation detection apparatus and method of manufacturing the same
- Patent Title (中): 辐射检测装置及其制造方法
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Application No.: US13927844Application Date: 2013-06-26
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Publication No.: US09054012B2Publication Date: 2015-06-09
- Inventor: Keiichi Nomura , Kazumi Nagano , Satoshi Okada , Yohei Ishida , Shoshiro Saruta , Yoshito Sasaki , Tomoaki Ichimura
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2012-150751 20120704
- Main IPC: G01T1/10
- IPC: G01T1/10 ; H01L27/146

Abstract:
A method of manufacturing a radiation detection apparatus is provided. On a sensor substrate on which a pixel array is formed, a scintillator layer that covers the pixel array, a sealing layer that covers a side face of the scintillator layer, and a protection layer that covers an upper face of the scintillator layer and an upper face of the sealing layer are formed. The sensor substrate, the sealing layer, and the protection layer along a side of the pixel array are cut such that a cut surface of the sensor substrate, a cut surface of the sealing layer, and a cut surface of the protection layer are arranged on the same plane.
Public/Granted literature
- US20140008749A1 RADIATION DETECTION APPARATUS AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2014-01-09
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