Invention Grant
US09054012B2 Radiation detection apparatus and method of manufacturing the same 有权
辐射检测装置及其制造方法

Radiation detection apparatus and method of manufacturing the same
Abstract:
A method of manufacturing a radiation detection apparatus is provided. On a sensor substrate on which a pixel array is formed, a scintillator layer that covers the pixel array, a sealing layer that covers a side face of the scintillator layer, and a protection layer that covers an upper face of the scintillator layer and an upper face of the sealing layer are formed. The sensor substrate, the sealing layer, and the protection layer along a side of the pixel array are cut such that a cut surface of the sensor substrate, a cut surface of the sealing layer, and a cut surface of the protection layer are arranged on the same plane.
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