Invention Grant
- Patent Title: Strip-shaped gate tunneling field effect transistor with double-diffusion and a preparation method thereof
- Patent Title (中): 具有双扩散的带状栅极隧道场效应晶体管及其制备方法
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Application No.: US14130496Application Date: 2013-07-08
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Publication No.: US09054075B2Publication Date: 2015-06-09
- Inventor: Ru Huang , Qianqian Huang , Yingxin Qiu , Zhan Zhan , Yangyuan Wang
- Applicant: PEKING UNIVERSITY
- Applicant Address: CN Beijing
- Assignee: PEKING UNIVERSITY
- Current Assignee: PEKING UNIVERSITY
- Current Assignee Address: CN Beijing
- Agency: Park, Kim & Suh, LLC
- Priority: CN201210501691 20121129
- International Application: PCT/CN2013/079013 WO 20130708
- International Announcement: WO2014/082451 WO 20140605
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/78 ; H01L29/66 ; H01L21/28 ; H01L21/266 ; H01L21/324 ; H01L29/73

Abstract:
The present invention discloses a strip-shaped gate-modulated tunneling field effect transistor with double-diffusion and a preparation method thereof, belonging to a field of CMOS field effect transistor logic device and the circuit. The tunneling field effect transistor includes a semiconductor substrate, a highly-doped source region, a highly-doped drain region, a double-diffusion source region, a gate dielectric layer, and a control gate, wherein the control gate has a strip-shaped structure with a gate length greater than a gate width, and at one side thereof is connected to the highly-doped drain region and at the other side thereof extends laterally into the highly-doped source region; a region located below the control gate is a channel region; the gate width of the control gate is less than twice width of a source depletion layer; the double-diffusion region has the same doping region as the highly-doped source region and the double-diffusion region has the same doping type as the highly-doped drain region; and the channel region located below a portion of the control gate portion in the highly-doped source region has double-diffusion source doped impurities. The TFET device according to the invention improves its performance, and the preparation method thereof is simple.
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